A predictive methodology for accurate substrate parasitic extraction

A methodology for determining the substrate profile for accurate prediction of parasitics using Green´s function based substrate extractors is presented. The technique requires fabrication of only a few test structures and results in an accurate three layered approximation. The substrate resistances are accurate to within 10% measurements. This methodology can be used along with scalable macromodel for a qualitative pre-design and pre-layout estimation of the digital switching noise that couples though the substrate to sensitive analog/RF circuits.