Structure design and optimization of high-g piezoresistive accelerometer

On the basis of the acceleration measurement of high impact, a high-g acceleration sensors of the piezoresistive beam - island structure at four-terminal all fixed supported was designed. The experimental results show that the structure existed the impact failure. To solve this problem, the structure processed the optimization design from improving inherent frequency of device and enhancing resistance overload ability of device. The structure parameters of the ultra-high overload acceleration sensor were made the corresponding adjustment. Through the comparison, it can be seen that the optimized structure can be more effectively prevent structure resonance. In full range load, the maximum stress of the structure can protect better the structure. Resistance overload ability also improved, the sensor can can guarantee normal work under 200, 000 g overload.