DocumentCode
3372272
Title
Wip control and calibration in a wafer fab
Author
Zhugen Zhou ; Rose, Oliver
Author_Institution
Comput. Sci. Dept., Univ. of Fed. Armed Forces Munich, Neubiberg, Germany
fYear
2012
fDate
9-12 Dec. 2012
Firstpage
1
Lastpage
12
Abstract
In this paper, a priority matrix table is used to assign priority to lots according to due date and workload information with the objective to keep lots going through the fab at the right pace to maintain WIP balance. Besides that, a WIP calibration method is proposed to recover WIP balance due to events such as unpredictable tool failure. The simulation results demonstrate that the proposed priority matrix table achieves a better WIP balance than FIFO (first in first out) and ODD (operation due date), and the WIP calibration method is able to correct for the WIP imbalance.
Keywords
calibration; semiconductor device manufacture; semiconductor technology; work in progress; FIFO; ODD; WIP balance; WIP calibration method; WIP control; first in first out; operation due date; priority matrix table; unpredictable tool failure; wafer fab; Calibration; Computational modeling; Manufacturing processes; Monitoring; Schedules; Throughput;
fLanguage
English
Publisher
ieee
Conference_Titel
Simulation Conference (WSC), Proceedings of the 2012 Winter
Conference_Location
Berlin
ISSN
0891-7736
Print_ISBN
978-1-4673-4779-2
Electronic_ISBN
0891-7736
Type
conf
DOI
10.1109/WSC.2012.6464988
Filename
6464988
Link To Document