• DocumentCode
    3372272
  • Title

    Wip control and calibration in a wafer fab

  • Author

    Zhugen Zhou ; Rose, Oliver

  • Author_Institution
    Comput. Sci. Dept., Univ. of Fed. Armed Forces Munich, Neubiberg, Germany
  • fYear
    2012
  • fDate
    9-12 Dec. 2012
  • Firstpage
    1
  • Lastpage
    12
  • Abstract
    In this paper, a priority matrix table is used to assign priority to lots according to due date and workload information with the objective to keep lots going through the fab at the right pace to maintain WIP balance. Besides that, a WIP calibration method is proposed to recover WIP balance due to events such as unpredictable tool failure. The simulation results demonstrate that the proposed priority matrix table achieves a better WIP balance than FIFO (first in first out) and ODD (operation due date), and the WIP calibration method is able to correct for the WIP imbalance.
  • Keywords
    calibration; semiconductor device manufacture; semiconductor technology; work in progress; FIFO; ODD; WIP balance; WIP calibration method; WIP control; first in first out; operation due date; priority matrix table; unpredictable tool failure; wafer fab; Calibration; Computational modeling; Manufacturing processes; Monitoring; Schedules; Throughput;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Simulation Conference (WSC), Proceedings of the 2012 Winter
  • Conference_Location
    Berlin
  • ISSN
    0891-7736
  • Print_ISBN
    978-1-4673-4779-2
  • Electronic_ISBN
    0891-7736
  • Type

    conf

  • DOI
    10.1109/WSC.2012.6464988
  • Filename
    6464988