A Low Power, Microvalve-Regulated Drug Delivery System using a SI Micro-Spring Pressurized Balloon Reservoir

Author

Evans, Allan T. ; Park, Jong M. ; Nellis, Gregory F. ; Klein, Sanford A. ; Feller, Jeffrey R. ; Salerno, Louis ; Gianchandani, Yogesh B.

Author_Institution

Univ. of Michigan, Ann Arbor

fYear

2007

fDate

10-14 June 2007

Firstpage

359

Lastpage

362

Abstract

This paper reports on a drug delivery system that provides modulated delivery of liquid-phase chemicals. The device uses silicon torsion springs on a 2times3 cm² chip to pressurize a soft polymeric reservoir and regulate flow with a piezoelectricaly actuated silicon microvalve that is 1.5times1.5times1 cm³. Using the finished device, regulated diffusion of a fluorescent dye into agar gel was demonstrated. Fluid flow out of the 500 muL reservoir could be regulated from 10-500 muL/min with up to 80 kPa of delivery pressure. Typical regulation consumes 0.136 muW of power. Analysis of the valve, reservoir springs, and a model based on pressure-enhanced diffusion are presented and are validated by experimental data.

Keywords

diffusion; drug delivery systems; elemental semiconductors; gels; medical control systems; microactuators; microvalves; piezoelectric actuators; silicon; springs (mechanical); Si; agar gel; fluorescent dye; liquid-phase chemicals; low-power drug delivery system; piezoelectric actuator; power 0.136 muW; pressure-enhanced diffusion; silicon microvalve; silicon torsion springs; soft polymeric reservoir; Chemicals; Drug delivery; Fluid flow; Fluorescence; Microvalves; Polymers; Reservoirs; Silicon; Springs; Valves; Drug Delivery; Microvalve; Piezoelectric; Torsion Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300142

Filename

4300142