Title :
A Totally Free Flexible Membrane: A Design for Low Electrostatic Actuation MEMS
Author :
Segueni, K. ; Rollier, A.-S. ; Le Garrec, L. ; Robin, R. ; Touati, S. ; Kanciurzewski, A. ; Buchaillot, L. ; Millet, O.
Author_Institution :
Haute Borne, Villeneuve-d´´Ascq
Abstract :
This paper presents a new electro-mechanical structure based on a totally free flexible membrane. This structure allows low actuation voltage (< 6.5 V) and more reliable mechanical behavior in terms of induced stress and environmental constraints. RF MEMS switch is presented as main application for low electrostatic actuation.
Keywords :
electrostatic actuators; flexible structures; membranes; microswitches; RF MEMS switch; electro-mechanical structure; environmental constraints; low electrostatic actuation MEMS; mechanical behavior; totally free flexible membrane; Biomembranes; Electrodes; Electrostatic actuators; Fabrication; Low voltage; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Stress; Switches; Electrostatic Actuation; Free Membrane; Low Temperature Process; MEMS; RF MEMS Switch; Reliability; Surface Micromachining;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300167
