DocumentCode
3372872
Title
A Totally Free Flexible Membrane: A Design for Low Electrostatic Actuation MEMS
Author
Segueni, K. ; Rollier, A.-S. ; Le Garrec, L. ; Robin, R. ; Touati, S. ; Kanciurzewski, A. ; Buchaillot, L. ; Millet, O.
Author_Institution
Haute Borne, Villeneuve-d´´Ascq
fYear
2007
fDate
10-14 June 2007
Firstpage
461
Lastpage
464
Abstract
This paper presents a new electro-mechanical structure based on a totally free flexible membrane. This structure allows low actuation voltage (< 6.5 V) and more reliable mechanical behavior in terms of induced stress and environmental constraints. RF MEMS switch is presented as main application for low electrostatic actuation.
Keywords
electrostatic actuators; flexible structures; membranes; microswitches; RF MEMS switch; electro-mechanical structure; environmental constraints; low electrostatic actuation MEMS; mechanical behavior; totally free flexible membrane; Biomembranes; Electrodes; Electrostatic actuators; Fabrication; Low voltage; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Stress; Switches; Electrostatic Actuation; Free Membrane; Low Temperature Process; MEMS; RF MEMS Switch; Reliability; Surface Micromachining;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location
Lyon
Print_ISBN
1-4244-0842-3
Electronic_ISBN
1-4244-0842-3
Type
conf
DOI
10.1109/SENSOR.2007.4300167
Filename
4300167
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