Title :
Degradation mechanisms of vertical cavity surface emitting lasers
Author :
Cheng, Y. Michael ; Herrick, Robert W. ; Petrof, Pierre M. ; Hibbs-Brenner, Mary K. ; Morgan, Robert A.
Author_Institution :
Dept. of Mater. Eng., California Univ., Santa Barbara, CA, USA
fDate :
April 30 1996-May 2 1996
Abstract :
We present the results of our failure analysis of proton-implanted vertical cavity surface emitting lasers (VCSELs). We show that VCSELs have a unique failure mode with the degradation occurring not only in the active regions, but also strikingly in the p-DBR mirror layers. The defect structures associated with degradation are analyzed by cathodoluminescence, electroluminescence and are identified by transmission electron microscopy. The processes involved in the p-DBR degradation are discussed.
Keywords :
cathodoluminescence; distributed Bragg reflector lasers; electroluminescence; failure analysis; ion implantation; laser mirrors; laser reliability; semiconductor lasers; surface emitting lasers; transmission electron microscopy; active regions; cathodoluminescence; degradation mechanisms; electroluminescence; failure analysis; failure mode; p-DBR mirror layers; proton-implanted lasers; transmission electron microscopy; vertical cavity surface emitting lasers; Data communication; Degradation; Fiber lasers; Laser modes; Mirrors; Scanning electron microscopy; Semiconductor lasers; Surface emitting lasers; Transmission electron microscopy; Vertical cavity surface emitting lasers;
Conference_Titel :
Reliability Physics Symposium, 1996. 34th Annual Proceedings., IEEE International
Conference_Location :
Dallas, TX, USA
Print_ISBN :
0-7803-2753-5
DOI :
10.1109/RELPHY.1996.492121
