A practical suspended spiral inductor for MMIC application

Author

Fang, Min ; Wang, Jin-Yan ; Lin, Shu-Xun ; Meng, Di ; Cai, Yong ; Hao, Yi-Long ; Wen, Cheng P.

Author_Institution

Nat. Key Lab. of Micro/Nano Fabrication Technol., Peking Univ., Beijing, China

fYear

2011

fDate

1-3 Nov. 2011

Firstpage

400

Lastpage

403

Abstract

In this paper, we propose an air-bridge based on-chip suspended inductor for MMIC application. The quality factor of suspended inductor on sapphire is 10.6 at 4.0 GHz, which is improved by almost 50%, comparing with traditional air-bridge based inductor of the same size. The self-resonance frequency is also improved from 9 GHz to 10 GHz. Several key fabrication processes of this suspended inductor will be presented to illustrate that our method is exactly the same as general air-bridge inductor fabrication processes in MMIC. By analyzing the equivalent circuits of RF inductors, it is shown that the suspended inductor yields lower parasitic capacitance and suffers smaller substrate loss.

Keywords

III-V semiconductors; MMIC; equivalent circuits; gallium compounds; inductors; wide band gap semiconductors; GaN; MMIC application; RF inductors; air-bridge based on-chip suspended spiral inductor; equivalent circuits; fabrication processes; frequency 4 GHz; frequency 9 GHz to 10 GHz; parasitic capacitance; self-resonance frequency; substrate loss; Fabrication; Inductance; Inductors; MMICs; Q factor; Spirals; Substrates; GaN MMIC; Suspended spiral inductor; compatible process;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave, Antenna, Propagation, and EMC Technologies for Wireless Communications (MAPE), 2011 IEEE 4th International Symposium on

Conference_Location

Beijing

Print_ISBN

978-1-4244-8265-8

Type

conf

DOI

10.1109/MAPE.2011.6156291

Filename

6156291