Title :
The effects of reverse-bias emitter-base stress on the cryogenic operation of advanced UHV/CVD Si- and SiGe-base bipolar transistors
Author :
Babcock, Jeff A. ; Joseph, Alvin J. ; Cressler, John D.
Author_Institution :
Alabama Microelectron. Sci. & Technol. Center, Auburn Univ., AL, USA
fDate :
April 30 1996-May 2 1996
Abstract :
This paper demonstrates for the first time that hot carrier injection resulting from reverse-bias emitter-base (EB) stress at 300 K can result in significant shifts in the low-temperature electrical characteristics of epitaxially grown Si- and SiGe-base bipolar transistors. At low injection, the observed temperature dependence of the stress-induced base current leakage is attributed to a Poole-Frenkel field-enhanced tunneling mechanism. We have also observed for the first time a minor enhancement of the low temperature collector current after EB stress at 300 K. This enhancement in the collector current is attributed to a slight modification in the emitter-to-base space-charge-region via stress-induced trapped-charge located at or near the spacer oxide separating the emitter-base contact regions.
Keywords :
Ge-Si alloys; Poole-Frenkel effect; bipolar transistors; cryogenic electronics; elemental semiconductors; heterojunction bipolar transistors; hot carriers; leakage currents; semiconductor device reliability; semiconductor materials; silicon; space charge; tunnelling; 300 K; 77 K; Poole-Frenkel field-enhanced tunneling mechanism; Si; Si BJT; SiGe; SiGe-base HBT; UHV/CVD bipolar transistors; cryogenic operation; hot carrier injection; low-temperature electrical characteristics; reverse-bias emitter-base stress; space-charge-region; spacer oxide; stress-induced base current leakage; stress-induced trapped-charge; temperature dependence; Bipolar transistors; Cryogenics; Electric variables; Germanium silicon alloys; Heterojunction bipolar transistors; Microelectronics; Silicon germanium; Stress; Temperature; Tunneling;
Conference_Titel :
Reliability Physics Symposium, 1996. 34th Annual Proceedings., IEEE International
Conference_Location :
Dallas, TX, USA
Print_ISBN :
0-7803-2753-5
DOI :
10.1109/RELPHY.1996.492133