DocumentCode
3373524
Title
Hydrogen Passivation of Boron Acceptors and Long-Term Breakdown Voltage Instability in N/sup +//P Su
Author
Ciappa, Mauro ; Malberti, Paolo ; Birolini, Alessandro
fYear
1996
fDate
April 30 1996-May 2 1996
Firstpage
327
Keywords
Boron; Failure analysis; Hydrogen; Mass spectroscopy; Passivation; Plasma temperature; Schottky diodes; Semiconductor diodes; Semiconductor materials; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1996. 34th Annual Proceedings., IEEE International
Conference_Location
Dallas, TX, USA
Print_ISBN
0-7803-2753-5
Type
conf
DOI
10.1109/RELPHY.1996.492138
Filename
492138
Link To Document