DocumentCode :
3373544
Title :
Novel MCM Interconnection Analysis Using Capacitive Charge Generation (CCG)
Author :
Cole, Edward I., Jr. ; Peterson, Kenneth A. ; Barton, Daniel L.
fYear :
1996
fDate :
April 30 1996-May 2 1996
Firstpage :
332
Keywords :
Conductors; Dielectrics and electrical insulation; Electron beams; Failure analysis; Integrated circuit interconnections; Physics; Scanning electron microscopy; Signal generators; Surface charging; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium, 1996. 34th Annual Proceedings., IEEE International
Conference_Location :
Dallas, TX, USA
Print_ISBN :
0-7803-2753-5
Type :
conf
DOI :
10.1109/RELPHY.1996.492139
Filename :
492139
Link To Document :
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