Title :
Novel MCM Interconnection Analysis Using Capacitive Charge Generation (CCG)
Author :
Cole, Edward I., Jr. ; Peterson, Kenneth A. ; Barton, Daniel L.
fDate :
April 30 1996-May 2 1996
Keywords :
Conductors; Dielectrics and electrical insulation; Electron beams; Failure analysis; Integrated circuit interconnections; Physics; Scanning electron microscopy; Signal generators; Surface charging; Voltage;
Conference_Titel :
Reliability Physics Symposium, 1996. 34th Annual Proceedings., IEEE International
Conference_Location :
Dallas, TX, USA
Print_ISBN :
0-7803-2753-5
DOI :
10.1109/RELPHY.1996.492139