DocumentCode :
3373583
Title :
New Laser Beam Neating Methods Applicable to Fault Localization and Defect Detection in VLSI Devices
Author :
Nikawa, Kiyoshi ; Inoue, Shoji
fYear :
1996
fDate :
April 30 1996-May 2 1996
Firstpage :
346
Keywords :
Brightness; Cathode ray tubes; Control systems; Fault detection; Laser beams; Lighting control; Surface emitting lasers; System testing; Transmission electron microscopy; Very large scale integration;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium, 1996. 34th Annual Proceedings., IEEE International
Conference_Location :
Dallas, TX, USA
Print_ISBN :
0-7803-2753-5
Type :
conf
DOI :
10.1109/RELPHY.1996.492141
Filename :
492141
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3373583
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