DocumentCode :
3373665
Title :
Nanoscopic EBIC technique in a hybrid SEM/SFM system
Author :
Heiderhoff, R. ; Cramer, R.M. ; Balk, L.J.
fYear :
1996
fDate :
April 30 1996-May 2 1996
Firstpage :
366
Keywords :
Current measurement; Electric variables measurement; Electron beams; Force measurement; Leakage current; Scanning electron microscopy; Schottky barriers; Schottky diodes; Semiconductor process modeling; Spatial resolution;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium, 1996. 34th Annual Proceedings., IEEE International
Conference_Location :
Dallas, TX, USA
Print_ISBN :
0-7803-2753-5
Type :
conf
DOI :
10.1109/RELPHY.1996.492144
Filename :
492144
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3373665
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