Extremely High Capacitance Ratio (C/R) RF MEMS Variable Capacitor with Chameleon Actuators

Author

Nishiyama, Madoka ; Konishi, Hiroshi ; Suzuki, Junji ; Tezuka, Yasuo ; Suzuki, Yoshihiko ; Suzuki, Kenichiro

Author_Institution

Nikon Corp., Kanagawa

fYear

2007

fDate

10-14 June 2007

Firstpage

631

Lastpage

634

Abstract

In this paper, we propose a novel variable capacitor having higher capacitance ratio (C/R) >35 than ever before. So far, various types of RF-MEMS variable capacitors have been proposed, but even the highest C/R among the capacitors under development is now the order of 4. For enabling the multi-band of the wireless terminal, it has been expected to achieve a device having higher C/R. We demonstrate by combining arbitrarily the quantity of the chameleon actuators and the area of capacitor plate, the capacitance value can be digitally controlled in a wide range.

Keywords

actuators; capacitors; micromechanical devices; RF MEMS variable capacitor; capacitance ratio; chameleon actuators; Actuators; Capacitors; Circuits; Digital control; Electrodes; Parasitic capacitance; Radio frequency; Radiofrequency microelectromechanical systems; Silicon compounds; Voltage; Capacitance Ratio; Chameleon Actuator; RF MEMS; surface micromachining process; variable capacitor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300209

Filename

4300209