Title :
A Plastic W-Band MEMS Phase Shifter
Author :
Sammoura, Firas ; Lin, Liwei
Author_Institution :
Univ. of California at Berkeley, Berkeley
Abstract :
A plastic, W-band MEMS phase shifter realized in a WR-10 waveguide architecture with built-in deformable diaphragms has been successfully demonstrated. A prototype device has been fabricated based on a two-cavity Iris filter design with two 1.6 mm in diameter deformable membranes on one side. Experimental results show that a total phase shift of 110deg at 95 GHz has been achieved under membrane deformation from -50 mum to +150 mum with corresponding insertion loss of 2.9 dB and 3.48 dB, respectively. This concept and approach could potentially open up a new class of opportunities in low-cost plastic components for millimeter-wave systems, including electronically scanned radar.
Keywords :
micromechanical devices; millimetre wave devices; phase shifters; waveguide filters; deformable diaphragm; frequency 95 GHz; iris filter design; loss 2.9 dB; loss 3.48 dB; membrane deformation; millimeterwave system; plastic W-band MEMS phase shifter; waveguide architecture; Biomembranes; Ferrites; Filters; Iris; Micromechanical devices; Millimeter wave measurements; Millimeter wave technology; Phase shifters; Plastics; Solid state circuits; Phase Shifters; Plastic MEMS; W-Band; millimeter-waves;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300213
