Circular Plate Electrostatic Zipping Actuator for the Application of a Tunable Electromagnetic Cavity Resonator

Author

Yang, X. ; Lang, J.H. ; Slocum, A.H.

Author_Institution

Analog Devices Inc., Cambridge

fYear

2007

fDate

10-14 June 2007

Firstpage

655

Lastpage

658

Abstract

This paper presents a proof-of-concept design of a MEMS tunable capacitor for an electromagnetic cavity resonator, by using a circular plate electrostatic zipping actuator. The design, fabrication and mechanical testing of a device containing the actuator and the capacitor will be presented. The testing results are compared with a finite element model using coupled-field analysis with ANSYS.

Keywords

capacitors; cavity resonators; electromagnetic actuators; electrostatic actuators; finite element analysis; MEMS tunable capacitor; circular plate electrostatic zipping actuator; coupled-field analysis; device design; device fabrication; device mechanical testing; finite element model; tunable electromagnetic cavity resonator; Capacitors; Cavity resonators; Electrodes; Electromagnetic coupling; Electrostatic actuators; Fabrication; Frequency; Micromechanical devices; Silicon; Testing; coupled-field analysis with ANSYS; electromagnetic cavity resonator; electrostatic zipping actuator; tunable capacitor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300215

Filename

4300215