Title :
Improving yield learning by rapid electrical fault inspection and localization
Author :
Kim, Beomjun ; Hong, Jongtaek ; Han, Yongwoon ; Kapilevich, Izak ; Block, Jeff ; Lundquist, Ted ; Kim, Myung Hwan
Author_Institution :
Samsung Electron., Yongin, South Korea
Abstract :
From wafer sort to yield learning is a long, complex process. Even worst because when scan chains fail, wafer sort adds negligible value. To address this gap a fast, reliable and accurate localization technology for scan chain fails that enable rapid translation of these into yield learning is presented.
Keywords :
electrical faults; fault diagnosis; integrated circuit reliability; rapid electrical fault inspection; rapid electrical fault localization; wafer sort; yield learning; Design automation; Frequency modulation; Lasers; Logic testing; Pins; Probes; Transistors;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2012 19th IEEE International Symposium on the
Conference_Location :
Singapore
Print_ISBN :
978-1-4673-0980-6
DOI :
10.1109/IPFA.2012.6306319
