Title :
ICMTS 2002. Proceedings of the 2002 International Conference on Microelectronic Test Structures (Cat. No.02CH37357)
Keywords :
integrated circuit testing; MEMS; RF modelling; interconnect; matching; microelectronic test structure; nonvolatile memory; parameter extraction; photonics; process characteristics; reliability; yield;
Conference_Titel :
Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on
Conference_Location :
Cork, Ireland
Print_ISBN :
0-7803-7464-9
DOI :
10.1109/ICMTS.2002.1193157
