Title :
Monolithic RF MEMS Probe Array System using RF MEMS SP3T Switches for Permittivity Measurement
Author :
Kim, Jung-Mu ; Kim, Namgon ; Park, Jae-Hyoung ; Cheon, Changyul ; Kwon, Youngwoo ; Kim, Yong-Kweon
Author_Institution :
Seoul Nat. Univ., Seoul
Abstract :
The monolithic RF MEMS probe array system for the application of permittivity measurement was firstly proposed and implemented. The proposed system consists of RF MEMS probe array and RF MEMS SP3T(single-pole triple-throw) switches. We succeeded to show the feasibility of the system for the permittivity measurement experimentally through the permittivity measurement of liquid as operating RF MEMS switches in turn.
Keywords :
MMIC; microswitches; permittivity measurement; SP3T switches; monolithic RF MEMS; permittivity measurement; probe array system; Bonding; Coaxial components; Dielectric substrates; Fabrication; Gold; Permittivity measurement; Probes; Radiofrequency microelectromechanical systems; Strips; Switches; RF MEMS probe system; RF MEMS switch; permittivity measurement;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300217
