DocumentCode
3373893
Title
Impact of probe configuration and calibration techniques on quality factor determination of on-wafer inductors for GHz applications
Author
Havens, R.J. ; Tiemeijer, L.F. ; Garnbus, L.
Author_Institution
Philips Res. Labs., Eindhoven, Netherlands
fYear
2002
fDate
8-11 April 2002
Firstpage
19
Lastpage
24
Abstract
We demonstrate that the quality factors measured on on-wafer (spiral) inductor test-structures are largely influenced by the choice between ground-signal and ground-signal-ground probe configuration. In particular when the SOLT network analyzer calibration technique is used in combination with ground-signal probing, the quality factor value can be overestimated significantly.
Keywords
Q-factor measurement; calibration; inductors; network analysers; probes; RF test structure; SOLT network analyzer; calibration technique; ground-signal probe configuration; ground-signal-ground probe configuration; on-wafer spiral inductor; quality factor measurement; BiCMOS integrated circuits; Calibration; Electrical resistance measurement; Impedance; Inductors; Probes; Q factor; Radio frequency; Spirals; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on
Print_ISBN
0-7803-7464-9
Type
conf
DOI
10.1109/ICMTS.2002.1193164
Filename
1193164
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