Title :
Highly-Mobile 2D Micro Impact Actuator for Space Applications
Author :
Mita, Makoto ; Takahashi, Kazuhiro ; Ataka, Manabu ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi
Author_Institution :
JAXA, Chofu
Abstract :
We have developed a two-dimensionally maneuverable micro impact-actuator for space applications with high mobility and robustness using impact motion of a suspended mass. Compared with our previous device using an electrostatic parallel plate mechanism, stepping efficiency has been greatly improved by the using comb-drive mechanism to drive inertia-mass two-dimensionally. Typical rover speed of 8-9 microns/sec was observed with pulse voltage of 100 V at 200 Hz.
Keywords :
aerospace instrumentation; electrostatic devices; microactuators; comb-drive mechanism; electrostatic parallel plate mechanism; highly-mobile 2D micro impact actuator; impact motion; inertia-mass; space h applications; suspended mass; Electrodes; Electrostatic actuators; Friction; Kinetic energy; Micromechanical devices; Planets; Space exploration; Space technology; Suspensions; Voltage; ICP-RIE; TOLASAM; impact actuator; space applications;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300220
