Title :
A combined RG/CF large-signal extraction methodology to improve CMOS SPICE-parameter precision
Author :
Mecking, S. ; Korbel, A. ; Paparisto, E. ; Langmann, U.
Author_Institution :
Ruhr-Univ. Bochum, Germany
Abstract :
This paper presents a simple and efficient parameter extraction methodology, based on time-domain large-signal measurements of two ring oscillators as test structures. This experimentally confirmed technique is a new tool for determining the parasitic gate resistance RG and for a fine tuning of the fringing capacitance CF of MOS transistors in one step. Thus CMOS switching speed can be predicted more accurately, compared to conventional parameter tuning methodologies and the expenditure of SPICE parameter extractions can be reduced.
Keywords :
MOSFET; SPICE; semiconductor device measurement; CMOS switching speed; MOS transistor; SPICE parameter extraction; fringing capacitance; parameter tuning; parasitic gate resistance; ring oscillator; test structure; time-domain large-signal measurement; Capacitance; Electrical resistance measurement; Impedance; Inverters; MOSFETs; Parameter extraction; Ring oscillators; Roentgenium; SPICE; Tuning;
Conference_Titel :
Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on
Print_ISBN :
0-7803-7464-9
DOI :
10.1109/ICMTS.2002.1193181