A Novel Device for Fixing Small Objects using Through-Pore Porous Silicon

A novel device that enables fixing small objects at a specified point on a Si substrate was developed. It will be useful if cell or other small objects can be fixed in a row on a chip and drug dosage to the each object can be controlled. By arranging objects in a row, observation will become easy and quick. Amount of drug usage is also expected to be reduced. It is known that mono crystalline Si becomes porous by anodization in a HF solution and through-pore porous Si region can be formed. By making the through-pore porous region on a specified area, objects can be fixed on the specified area by vacuum suction from the back side of the chip. In this study, patterned through-pore porous Si areas were made on a Si chip. It was observed that a polystyrene bead was fixed on a through-pore porous area of 7mum times 7mum.