Title :
Silicon NANO-ESI Emitters for Mass Spectrometry: A Mixed Micromechanical and Microfluidic Design
Author :
Legrand, B. ; Buchaillot, L. ; Ashcroft, A.E. ; Arscott, S.
Author_Institution :
Inst. d´´Electron. de Microelectronique et de Nanotechnologie, Villeneuve d´´Ascq
Abstract :
We present nanoelectrospray ionization (nanoESI) emitter chips based on a microcapillary slot fabricated using silicon-on-insulator (SOI) technology. We combine microelectromechanical systems (MEMS) and microfluidic design rules to ensure the rigidity of the structures by taking into account the effect of capillary forces present following the introduction of liquids into MEMS. The optimized fabrication process enables cost-effective batch production of chip-based micromachined nanoESI emitter chips. The nanoESI emitter chips were tested using nanoESI-mass spectrometry.
Keywords :
mass spectroscopy; microfluidics; silicon-on-insulator; capillary forces; mass spectrometry; microcapillary slot; microelectromechanical systems; microfluidic design; micromechanical design; nanoESI emitter chips; nanoelectrospray ionization emitters; silicon nanoESI emitters; silicon-on-insulator; Fabrication; Ionization; Liquids; Mass spectroscopy; Microelectromechanical systems; Microfluidics; Micromechanical devices; Optimized production technology; Silicon on insulator technology; Testing; MEMS; capillary forces; electrospraying; mass-spectrometry; microfluidics;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300249
