Title :
A comparison of extraction techniques for threshold voltage mismatch
Author :
Croon, J.A. ; Tuinhout, H.P. ; Difrenza, R. ; Knol, J. ; Moonen, A.J. ; Decoutere, S. ; Maes, H.E. ; Sansen, W.
Author_Institution :
IMEC, Leuven, Belgium
Abstract :
In this paper commonly used extraction methods of MOSFET threshold voltage mismatch are compared. The VT mismatch is extracted on the exact same device population by four independent characterization groups. Significant differences are observed, which are caused by differences in measurement setup and differences in extraction algorithm. The observed differences are analyzed. In addition merits and limitations of the various techniques are evaluated.
Keywords :
CMOS integrated circuits; MOSFET; integrated circuit testing; MOSFET threshold voltage; extraction techniques; measurement repeatability; threshold voltage mismatch; Analog circuits; CMOS technology; MOSFET circuits; Measurement techniques; Microelectronics; Modems; Semiconductor device measurement; Semiconductor device modeling; Testing; Threshold voltage;
Conference_Titel :
Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on
Print_ISBN :
0-7803-7464-9
DOI :
10.1109/ICMTS.2002.1193202