DocumentCode
3374678
Title
Millimeter wave measurement of Complex Permittivity by Perturbation method using Open Resonator
Author
Suzuki, Hirosuke ; Kamijo, Toshio
Author_Institution
Dev. & Tech. Div., KEYCOM Corp., Tokyo
Volume
1
fYear
2005
fDate
16-19 May 2005
Firstpage
493
Lastpage
496
Abstract
This article explains how to improve the measurement methods and the results to achieve the better accuracy of permittivity (relative dielectric constant epsiv´r) and tandelta (dielectric loss tangent) of thin films at 10-100 mum thick. A specimen´s thickness for an open resonator needs integer times of a wavelength to be measurable, so thinner specimens can not be measured by the open resonator. However, the use of the perturbation method made it possible to obtain the test results of permittivity and tandelta of ultra-thin specimens such as PTFE, FEP, a printed circuit board made of PTFE, identical to those by a measurement of thick specimens. It is important that the specimens be precisely placed and set in the center of the cavity
Keywords
millimetre wave measurement; permittivity measurement; resonators; thin films; 10 to 100 micron; Fabry-Perot resonators; cavity perturbation method; complex permittivity; dielectric loss tangent; dielectric measurements; millimeter wave measurement; open resonator; printed circuit board; relative dielectric constant; specimen thickness; thin films; ultra-thin specimens; Circuit testing; Dielectric loss measurement; Dielectric measurements; Dielectric thin films; Millimeter wave measurements; Millimeter wave technology; Permittivity measurement; Perturbation methods; Thickness measurement; Wavelength measurement; Cavity perturbation method; Dielectric measurements; Fabry-perot resonators; Millimeter wave measurements; Permittivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Instrumentation and Measurement Technology Conference, 2005. IMTC 2005. Proceedings of the IEEE
Conference_Location
Ottawa, Ont.
Print_ISBN
0-7803-8879-8
Type
conf
DOI
10.1109/IMTC.2005.1604164
Filename
1604164
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