Nanotube Micro-Opto-Mechanical Systems (N-MOMS)

Author

Lu, S. ; Shao, N. ; Liu, Y. ; Panchapakesan, B.

Author_Institution

Univ. of Delaware, Newark

fYear

2007

fDate

10-14 June 2007

Firstpage

1043

Lastpage

1046

Abstract

In this paper we report the first applications of single wall carbon nanotube based micro-optomechanical systems (MOMS). Thin films of nanotubes with line widths ranging less than 1.5 mum and thicknesses ranging from 40 to 700 nm were patterned into micro-mechanical systems using batch fabrication techniques. Arrays of nanotube based MOM actuators, MOM-micromirrors and MOM-micro-grippers were fabricated using CMOS compatible techniques. Nanotube based MOMS devices showed better performance compared to their MEMS based electrostatic silicon counterparts and consumed only 200 muW-170 mW of power. These studies open a new field of nanotube based MOMS that could potentially outperform silicon based MEMS devices.

Keywords

carbon nanotubes; grippers; micromechanical devices; micromirrors; thin films; MEMS based electrostatic silicon counterparts; batch fabrication techniques; carbon nanotube; microgrippers; micromechanical systems; micromirrors; nanotube microoptomechanical systems; Actuators; CMOS technology; Carbon nanotubes; Electrostatics; Fabrication; Message-oriented middleware; Micromechanical devices; Nanoscale devices; Silicon; Transistors; CMOS; MEMS; MOMS; Nanotube; actuators;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300312

Filename

4300312