Title :
A Lateral-Shift-Free and Large-Vertical-Displacement Electrothermal Actuator for Scanning Micromirror/Lens
Author :
Wu, L. ; Xie, H.
Author_Institution :
Univ. of Florida, Gainesville
Abstract :
This paper reports the design, fabrication and characterization of a novel lateral-shift-free (LSF) large-vertical-displacement (LVD) electrothermal actuator. Both micromirror and microlens holder based on the actuator design have been fabricated by a combined surface- and bulk- micromachining process. A 0.62 mm vertical displacement has been demonstrated at only 5.3 Vdc for a fabricated 0.8 mm by 0.8 mm micromirror, and both the lateral shift (10 mum) and tilting angle (0.7deg) are negligible in the full displacement range. The measured resonant frequency of the vertical motion resonance mode is 453 Hz.
Keywords :
frequency measurement; microactuators; microlenses; micromachining; micromirrors; frequency 453 Hz; large-vertical-displacement electrothermal actuator; lateral-shift-free electrothermal actuator; resonant frequency measurement; scanning microlens; scanning micromirror; size 0.62 mm; size 0.8 mm; surface-bulk micromachining process; vertical motion resonance mode; voltage 5.3 V; Actuators; Electrothermal effects; Fabrication; Frequency measurement; Lenses; Micromachining; Micromirrors; Microoptics; Motion measurement; Resonant frequency; Confocal imaging; Electrothermal bimorph actuator; Large vertical displacement (LVD); Lateral shift free (LSF); Microlens; Micromirror;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300320
