Title :
MEMS Rotary Actuator using an Integrated Ball Bearing and Air Turbine
Author :
Waits, C.M. ; Jankowski, N.R. ; Geil, B. ; Ghodssi, R.
Author_Institution :
Univ. of Maryland, College Park
Abstract :
The first silicon air-driven rotary actuation mechanism based on encapsulated ball bearings is reported. The method of integrating a silicon air turbine with a ball bearing support mechanism has been developed for silicon turbomachinery and tribological investigations. Rotational speeds up to 37,000 rpm and continuous operation longer than 24 hours were measured. Qualitative analysis is also presented, shedding light on silicon/ball wear and methods for increasing bearing lifetime and speeds.
Keywords :
ball bearings; microactuators; small electric machines; tribology; turbines; MEMS rotary actuator; MEMS tribology; ball bearing support mechanism; bearing lifetime; encapsulated ball bearings; integrated ball bearing; microball bearings; microturbine; silicon air turbine; silicon air-driven rotary actuation mechanism; silicon turbomachinery; silicon/ball wear; tribological investigations; Ball bearings; Etching; Fabrication; Geometry; Micromechanical devices; Pneumatic actuators; Silicon; Tribology; Turbines; Wafer bonding; MEMS Tribology; Microball Bearings; Microturbine;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300334
