Title :
Design and Fabrication of an Electrostatic Micromotor with a Low Operating Voltage
Author :
Basha, Mohamed A. ; Safavi-Naeini, Safieddin ; Chaudhuri, Sujeet K.
Author_Institution :
Univ. of Waterloo, Waterloo
Abstract :
We present the design, fabrication, and experimental results of a large electrostatic side-drive micromotor with a low operating voltage. "Rotor-pole-shaping" (RPS) design technique was used to optimize the rotor pole shape to maximize the driving torque. The micromotor has a rotor diameter of 800 mum and the lowest reported operating voltage of 16 V. The significant low driving voltage makes the integration of electrostatic micromotors possible with CMOS as a driving voltage circuit.
Keywords :
electrostatic motors; rotors; CMOS; driving torque; electrostatic side-drive micromotor; low operating voltage; rotor pole shape; rotor-pole-shaping design technique; Assembly; Electrostatics; Fabrication; Low voltage; Micromirrors; Micromotors; Optical switches; Solid state circuits; Stators; Torque; Electrostatic; Finite-Element; Micromotors; Rotor-Pole-Shaping;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300336
