Title :
Simulation in automated material handling systems design for semiconductor manufacturing
Author :
Nadoli, Gajanana ; Pillai, Devadas
Author_Institution :
Autom. Mater. Handling Syst., Intel Corp., Chandler, AZ, USA
Abstract :
We present the simulation methodologies used in the design of automated material handling systems (AMHS) at the Intel wafer fabs. The models used in AMHS design can be categorized as AMHS models and production models. The AMHS models support the design of Interbay and Intrabay systems. The Interbay systems handle the material flow between different bays (production centers). The systems handle the material flow within the bays. The production models compliment the AMHS models. We review the general model structures and simulation examples under these categories used in actual system implementations.
Keywords :
computer integrated manufacturing; digital simulation; electronic engineering computing; integrated circuit manufacture; materials handling; semiconductor device manufacture; Intel wafer fabs; Interbay systems; Intrabay systems; automated material handling systems; material flow; model structures; production centers; production models; semiconductor manufacturing simulation; simulation methodologies; system implementations; systems design; Analytical models; Contamination; Manufacturing automation; Material storage; Materials handling; Production systems; Semiconductor device manufacture; Semiconductor device modeling; Semiconductor materials; Virtual manufacturing;
Conference_Titel :
Simulation Conference Proceedings, 1994. Winter
Print_ISBN :
0-7803-2109-X
DOI :
10.1109/WSC.1994.717465
