Anti-Phase Driven Rate Gyroscope with Multi-Degree of Freedom Sense Mode

Previously, we reported a 3-DOF (degree of freedom) rate gyroscope design with a 1-DOF drive and 2-DOF sense mode that was shown to be robust to environmental fluctuations. In this work, we introduce a novel design concept that combines the robustness of multi-DOF sensing with the common mode rejection of tuning fork devices in the anti-phase driven 6-DOF gyroscope. Prototypes of the design were fabricated and characterized for both rotational and acceleration inputs. For acceleration loads, the device responded in a common mode resulting in a 75% reduction in amplitude for a differential signal, while for rotations, it responded in anti-phase with sensitivities of 1.687 muV/deg/s and -1.887 muV/deg/s.