Title :
Vibrating Beam Accelerometer with Hard Suspension Beams
Author :
Maenaka, Kazusuke ; Miki, Yoshihiko ; Okada, Hiroki ; Fujita, Takayuki
Author_Institution :
Univ. of Hyogo, Himeji
Abstract :
This report provides a bulk-micromachined vibratory beam accelerometer. The device structure includes a frame, heavy mass, thick suspension beams and thin vibrating beams. The suspension beams are designed to be soft to the sensitive axis and hard to the off-axis. This brings about low off-axis sensitivity and high shock survivability. Combining with analog/digital mixed interface circuitry, the characteristics of the device were examined. By Allan deviation, we found that our system has a resolution of 55 muG/Hz1/2 for the device operating at 1 mTorr and 155 muG/Hz1/2 for the atmospheric pressure.
Keywords :
accelerometers; microsensors; Allan deviation; bulk-micromachined vibratory beam accelerometer; hard suspension beams; vibrating beam accelerometer; Accelerometers; Circuits; Electric shock; Force sensors; Magnetic sensors; Micromechanical devices; Q factor; Resonance; Resonant frequency; Wiring; MEMS; VBA; acceleration sensor; vibratory beam accelerometer;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300353
