• DocumentCode
    3376391
  • Title

    Vibrating Beam Accelerometer with Hard Suspension Beams

  • Author

    Maenaka, Kazusuke ; Miki, Yoshihiko ; Okada, Hiroki ; Fujita, Takayuki

  • Author_Institution
    Univ. of Hyogo, Himeji
  • fYear
    2007
  • fDate
    10-14 June 2007
  • Firstpage
    1207
  • Lastpage
    1210
  • Abstract
    This report provides a bulk-micromachined vibratory beam accelerometer. The device structure includes a frame, heavy mass, thick suspension beams and thin vibrating beams. The suspension beams are designed to be soft to the sensitive axis and hard to the off-axis. This brings about low off-axis sensitivity and high shock survivability. Combining with analog/digital mixed interface circuitry, the characteristics of the device were examined. By Allan deviation, we found that our system has a resolution of 55 muG/Hz1/2 for the device operating at 1 mTorr and 155 muG/Hz1/2 for the atmospheric pressure.
  • Keywords
    accelerometers; microsensors; Allan deviation; bulk-micromachined vibratory beam accelerometer; hard suspension beams; vibrating beam accelerometer; Accelerometers; Circuits; Electric shock; Force sensors; Magnetic sensors; Micromechanical devices; Q factor; Resonance; Resonant frequency; Wiring; MEMS; VBA; acceleration sensor; vibratory beam accelerometer;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
  • Conference_Location
    Lyon
  • Print_ISBN
    1-4244-0842-3
  • Electronic_ISBN
    1-4244-0842-3
  • Type

    conf

  • DOI
    10.1109/SENSOR.2007.4300353
  • Filename
    4300353
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3376391