A Fully Integrated MEMS-Based Convective 3-DOF Gyroscope

This paper presents the concept, design and simulation of the first 3-DOF convective gyroscope, which can detect three components of applied angular rate independently. The working principle of this gas gyroscope is based on forced convection heat transfer and thermoresistive effect. The design, flow simulation, and sensitivity analyses have been done. Optimization in terms of sensitivity and stability was taken into account. The simulated sensitivities of the sensor for the X-axis, F-axis and Z-axis are SF_x = 1.9 muV/degs, SF_y= 1.1muV/degs, SF_Z= 0.4 muV/degs, respectively, with power consumption of 5.4mW. The proposed fabrication process and some preliminary results will be introduced.