High Frequency Surface Acoustic Wave Atomizer

Author

Ju, J. ; Yamagata, Y. ; Higuchi, T. ; Inoue, K. ; Ohmori, H.

Author_Institution

Univ. of Tokyo, Tokyo

fYear

2007

fDate

10-14 June 2007

Firstpage

1279

Lastpage

1282

Abstract

A high-frequency Surface Acoustic Wave (SAW) atomizer which resonance frequency is 50 MHz is newly constructed and tested. Atomization characteristics are evaluated by means of electrostatic deposition (SAW-ED) and drop sensing with Laser Doppler Anemometry (LDA). In the electrostatic deposition methods, mean size of deposited dry particles is 0.7 mum, and its estimated size of atomized droplets is approximately 8.5 mum. In case of LDA measurement, average drop size is 8.3 mum. Based on these results, proposed 50 MHz SAW atomizer shows good performance in terms of drop size, compared with former lower-frequency type.

Keywords

laser Doppler anemometry; surface acoustic wave devices; electrostatic deposition; frequency 50 MHz; high frequency surface acoustic wave atomizer; laser doppler anemometry; resonance frequency; size 0.7 mum; size 8.3 mum; Acoustic testing; Acoustic waves; Atomic beams; Atomic layer deposition; Atomic measurements; Electrostatics; Linear discriminant analysis; Resonance; Resonant frequency; Surface acoustic waves; High Frequency Atomization; Surface Acoustic Wave Atomizer; Ultrasonic atomization;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300371

Filename

4300371