Title :
Design and Fabrication of the High Directional Ultrasonic Ranging Sensor to Enhance the Spatial Resolution
Author :
Lee, Haksue ; Kang, Daesil ; Moon, Wonkyu
Author_Institution :
POSTECH, Pohang
Abstract :
A new ultrasonic ranging transducer with high directionality is developed to enhance the spatial resolution in the pulse-echo measurement in air. The concept of the parametric transmitting array is applied to the design. A high-performance piezoelectric micro-machined ultrasonic transducer (pMUT) array is designed and fabricated in this study. The indirectly generated pulse has a beam-width of around 5deg and a sound pressure level (SPL) of over 85 dB at the peak. For a practical application, the higher sound pressure level should be achieved.
Keywords :
acoustic intensity; acoustic parametric devices; micromachining; microsensors; piezoelectric transducers; ultrasonic measurement; ultrasonic transducer arrays; air pulse-echo measurement; high directional ultrasonic ranging sensor design; parametric transmitting array; piezoelectric micromachined ultrasonic transducer array fabrication; pulse generation; sound pressure level; spatial resolution enhancement; ultrasonic ranging transducer; Acoustic measurements; Acoustic transducers; Fabrication; Frequency; Piezoelectric transducers; Pulse measurements; Sensor arrays; Spatial resolution; Ultrasonic transducer arrays; Ultrasonic transducers; High Directional Ranging Sensor; Micro-machined Ultrasonic Transducer; Parametric Array;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300377
