Title :
Exceptional Wear Resistance of MEMS Devices Coated with Carbon-Doped Alumina Films
Author :
Carraro, C. ; Chinn, J. ; Kobrin, B.
Author_Institution :
Department of Chemical Engineering and Berkeley Sensor and Actuator Center, University of California, Berkeley, CA 94720, USA. Tel: +1-510-643-8209; E-mail: carraro@yahoo.com
Abstract :
Wear test polysilicon MEMS microstructures coated with a nanometer-thin layer of carbon-rich alumina exhibit the highest time-to-failure documented to date for hard lubricating coatings.
Keywords :
Actuators; Coatings; Microelectromechanical devices; Micromechanical devices; Microstructure; Silicon; Solid state circuits; Temperature; Testing; Wearable sensors; MEMS; coatings; reliability; wear;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon, France
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300382
