Title :
Si Micro Probe and SiO2 Micro Tube Array Integrated with nMOSFETs
Author :
Takei, Kuniharu ; Kawashima, Takahiro ; Takao, Hidekuni ; Sawada, Kazuaki ; Ishida, Makoto
Author_Institution :
Toyohashi Univ. of Technol., Toyohashi
Abstract :
This paper describes a device design, fabrication, experimental results, and mechanical strength for a multi functional device of neural behavioral analysis. The device has been fabricated with Si micro probe of 2 mum in diameter and SiO2 micro tube of 3.6 mum in outer diameter on circuit of MOSFETs, using standard IC process followed by a selective VLS growth and MEMS techniques. MOSFETs´ performance on Si(lll) is 150 mV/decade of subthreshold factor and 1.2 V of threshold voltage after the fabrication process of probes and tubes. Penetration experiment into the gelatin was carried out for an application of neural recording devices.
Keywords :
MOS integrated circuits; MOSFET; bioMEMS; biomedical electronics; biomedical equipment; neurophysiology; IC process; MEMS techniques; NMOSFET; Si; SiO2; VLS growth; fabrication process; gelatin; mechanical strength; microprobe; microtube array; multifunctional device; neural behavioral analysis; neural recording devices; size 2 mum; size 3.6 mum; voltage 1.2 V; Electrodes; Fabrication; Integrated circuit technology; MOSFETs; Neurons; Probes; Signal analysis; Signal processing; Solid state circuits; Thermal resistance; Micro electrode; Micro needle Neural probe; Micro tube; Vapor-Liquid-Solid (VLS);
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300400
