An Integrated Photonic MEMS Switch System with Fast Switching Speed and Low Power Demand

Author

Khoo, E.H. ; Li, J. ; Cai, H. ; Pinjala, D. ; Liu, A.Q.

Author_Institution

Nanyang Technol. Univ., Singapore

fYear

2007

fDate

10-14 June 2007

Firstpage

1449

Lastpage

1452

Abstract

This paper presents an integrated photonic MEMS switching system. The switching system consist of two perpendicular photonic crystal (PC) surface waveguide joined together to form a waveguide bend. An elliptical micro-mirror driven by a comb drive actuator is positioned with its foci at the end cells of the waveguide bend to provide the switching mechanism. When the position of the mirror is displaced, the propagation path of lightwaves from one waveguide to another is affected and this forms a switching system. This switching system has the advantages of fast switching speed of ~ 20 mus. a higher device density with an overall system size of ~ 10 mum x 10 mum compared with other MEMS switches.

Keywords

integrated optics; light propagation; microactuators; micromirrors; microswitches; photonic crystals; photonic switching systems; waveguide discontinuities; comb drive actuator; elliptical micromirror; integrated photonic MEMS switching system; lightwaves propagation path; microelectromechanical system; perpendicular photonic crystal surface waveguide; waveguide bend; Lattices; Micromechanical devices; Microswitches; Optical surface waves; Optical waveguides; Photonic crystals; Power demand; Surface waves; Switches; Switching systems; elliptical; micro-mirror; microelectromechanical system (MEMS); photonic crystal; switch;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300417

Filename

4300417