Title :
3-Axes Tactile Sensor with Tunable Sensing Range
Author :
Wen, Chih-Chieh ; Lin, Chia-Min ; Fang, Weileun
Author_Institution :
Nat. Tsing Hua Univ., Hsinchu
Abstract :
This study has successfully demonstrated a novel 3-axes polymer tactile sensor with built-in piezoresistive sensors. The sensor consists of polymer membrane and four sensing cantilevers with piezoresistors on both top and side walls to measure the in-plane and out-of-plane loads. The fabrication process allows the changing of polymer membrane material easily. As a result, the sensing range of the present 3 D tactile sensor is easily tuned by varying the polymer material.
Keywords :
microsensors; piezoresistive devices; polymers; resistors; tactile sensors; 3-axes tactile sensor; MEMS; piezoresistive sensors; piezoresistors; polymer material; polymer membrane; polymer sensor; sensing cantilevers; tunable sensing range; Biomembranes; Chemical sensors; Doping; Force sensors; Micromechanical devices; Piezoresistance; Piezoresistive devices; Polymers; Sensor phenomena and characterization; Tactile sensors; Piezoresistor; Side-wall doping; Tactile sensor; Tunable membrane;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300419
