An Integrated Micro-Analytical System for Complex Vapor Mixtures

Author

Zellers, Edward T. ; Reidy, Shaelah ; Veeneman, Rebecca A. ; Gordenker, Robert ; Steinecker, William H. ; Lambertus, Gordon R. ; Kim, Hanseup ; Potkay, Joseph A. ; Rowe, Michael P. ; Zhong, Qiongyan ; Avery, Christopher ; Chan, Helena K L ; Sacks, Richard

Author_Institution

Univ. of Michigan, Ann Arbor

fYear

2007

fDate

10-14 June 2007

Firstpage

1491

Lastpage

1496

Abstract

A micro gas chromatograph (muGC) capable of quantitatively analyzing the components of complex vapor mixtures at trace concentrations is described. The muGC features a micro- preconcentrator/focuser (muPCF), dual-column pressure- and temperature-programmed separation module, and an integrated array of nanoparticle-coated chemiresistors. The latest design modifications and performance data are presented. Highlights include a 4-min separation of a 30-component mixture with a 3-m DRIE Si/glass microcolumn, a 14-sec separation of an 11-component mixture on a 25-cm microcolumn, a complete multi-vapor analysis from a hybrid microsystem that combines analytical, rf- wireless, and microcontroller modules, and a rapid analysis driven by a 4-stage peristaltic micropump.

Keywords

chromatography; glass; micromechanical devices; nanoparticles; silicon; 4-stage peristaltic micropump; complex vapor mixtures; integrated micro-analytical system; microcolumn; microgas chromatograph; micropreconcentrator/focuser; multi-vapor analysis; nanoparticle-coated chemiresistors; temperature-programmed separation module; Biomedical monitoring; Focusing; Glass; Intelligent sensors; Micropumps; Nanoparticles; Performance analysis; Prototypes; Sensor arrays; Solid state circuits; gas analyzer; gas chromatograph; integrated microsystem; micro-analytical system;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300427

Filename

4300427