Title :
A Novel Tilting Micromirror with a Triangular Waveform Resonance Response and an Adjustable Resonance Frequency for Raster Scanning Applications
Author :
Elata, D. ; Leus, V. ; Hirshberg, A. ; Salomon, O. ; Naftali, M.
Author_Institution :
Fac. of Mech. Eng., Technion-Israel Inst. of Technol., Haifa
Abstract :
We present a novel tilting micro-mirror that has a triangular waveform resonance response, and a resonance frequency that can be continuously and reversibly adjusted. The triangular waveform and the adjustability of the resonance frequency are crucially important for raster-scanning applications. Although the mirror is driven by electrostatic forces, the triangular waveform is achieved by mechanical means. Our micro-mirror is driven by up to 60 Volts whereas to achieve the same waveform without the novel mechanical design would require extremely high voltages.
Keywords :
electrostatic actuators; micromirrors; adjustable resonance frequency; electrostatic actuation; electrostatic forces; raster scanning applications; tilting micromirror; triangular waveform resonance response; Displays; Electrostatic actuators; Micromirrors; Mirrors; Pixel; Q factor; Resonance; Resonant frequency; Strips; Voltage; Micromirrors; electrostatic actuation; raster scanning;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0841-5
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300431
