DocumentCode :
3377732
Title :
High Reflectivity Broadband Photonic Crystal Mirror MEMS Scanner
Author :
Jung, Il Woong ; Kim, Sora ; Solgaard, Olav
Author_Institution :
Stanford Univ., Stanford
fYear :
2007
fDate :
10-14 June 2007
Firstpage :
1513
Lastpage :
1516
Abstract :
In this paper we introduce a MEMS scanner with a highly reflective broadband photonic crystal mirror. These mirrors achieve higher reflectivity than metal reflectors and can tolerate higher processing temperatures. Photonic crystal mirrors can be made of a single dielectric material and hence are much simpler to fabricate than multi-layer dielectric stacks. Our photonic crystal mirror shows broadband high reflectivity in the wavelength spectrum from 1300 nm to 1500 nm. The single-axis MEMS scanner is fabricated on a SOI wafer and actuated by electrostatic combdrives on resonance. Dynamic deflection measurements show that the scanner achieves 20deg total scan angle with an input square wave of 40 V and up to 120deg total scan angle with 190 V at a resonance frequency of 2.03 kHz.
Keywords :
micromirrors; optical scanners; photonic crystals; reflectivity; broadband reflectivity; dynamic deflection measurements; high reflectivity broadband photonic crystal mirror MEMS scanner; optical MEMS; single dielectric material; Dielectric materials; Dielectric measurements; Electrostatic measurements; Frequency measurement; Micromechanical devices; Mirrors; Photonic crystals; Reflectivity; Resonance; Temperature; Broadband Reflectivity; MOEMS; Optical MEMS; Photonic Crystal Mirror; Scanner;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
Type :
conf
DOI :
10.1109/SENSOR.2007.4300432
Filename :
4300432
Link To Document :
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