NiFe Plated Biaxial Magnetostatic MEMS Scanner

Author

Yalcinkaya, Arda D. ; Urey, Hakan ; Holmstrom, Sven

Author_Institution

Bogazici Univ., Istanbul

fYear

2007

fDate

10-14 June 2007

Firstpage

1517

Lastpage

1520

Abstract

A two axis microelectromechanical system (MEMS) micromirror actuator is developed for display and imaging applications. The device operates on the principle of generated magnetostatic torque by a flux generating high-frequency electro coil and a magnetic layer deposited on the movable part. The device can supply full optical scan angles of 88deg (at 100 mA drive current) and 1.8deg for slow and fast scan directions, respectively. Using a mirror size of 1.5 mm, thetas_optldrD products of 132 deg-mm and 2.7 deg-mm for slow and fast axis are achieved, respectively. The scanner can be operated in air due to high mechanical quality factors of the order of 3000.

Keywords

magneto-optical devices; magnetostatics; microactuators; micromirrors; nickel alloys; optical scanners; NiFe; biaxial magnetostatic MEMS scanner; current 100 mA; flux generating high-frequency electro coil; magnetic layer; magnetostatic torque; mechanical quality factors; microelectromechanical system micromirror actuator; optical scan angles; Actuators; Displays; Magnetic devices; Magnetic flux; Magnetostatics; Microelectromechanical systems; Micromechanical devices; Micromirrors; Optical imaging; Torque; MOEMS; electromagnetic actuation; micro-scanner;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0841-5

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300433

Filename

4300433