Title :
NiFe Plated Biaxial Magnetostatic MEMS Scanner
Author :
Yalcinkaya, Arda D. ; Urey, Hakan ; Holmstrom, Sven
Author_Institution :
Bogazici Univ., Istanbul
Abstract :
A two axis microelectromechanical system (MEMS) micromirror actuator is developed for display and imaging applications. The device operates on the principle of generated magnetostatic torque by a flux generating high-frequency electro coil and a magnetic layer deposited on the movable part. The device can supply full optical scan angles of 88deg (at 100 mA drive current) and 1.8deg for slow and fast scan directions, respectively. Using a mirror size of 1.5 mm, thetasoptldrD products of 132 deg-mm and 2.7 deg-mm for slow and fast axis are achieved, respectively. The scanner can be operated in air due to high mechanical quality factors of the order of 3000.
Keywords :
magneto-optical devices; magnetostatics; microactuators; micromirrors; nickel alloys; optical scanners; NiFe; biaxial magnetostatic MEMS scanner; current 100 mA; flux generating high-frequency electro coil; magnetic layer; magnetostatic torque; mechanical quality factors; microelectromechanical system micromirror actuator; optical scan angles; Actuators; Displays; Magnetic devices; Magnetic flux; Magnetostatics; Microelectromechanical systems; Micromechanical devices; Micromirrors; Optical imaging; Torque; MOEMS; electromagnetic actuation; micro-scanner;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0841-5
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300433
