Novel Spatial Light Phase Modulator with Bidirectional Tilt-Pistonmicromirror Array

Author

Yamashita, S. ; Mita, M. ; Fujita, H. ; Yamamoto, T. ; Kawai, M. ; Yano, M.

Author_Institution

Fujitsu Lab. Ltd., Atsugi

fYear

2007

fDate

10-14 June 2007

Firstpage

1521

Lastpage

1524

Abstract

We have proposed a novel structure of one dimensional spatial light phase modulator (SLPM) that consists of a micromirror array on an SOI wafer and ITO (Indium Tin Oxide) electrodes on a glass plate. Each micromirror can exhibit bidirectional single-axis rotation, as well as up- and down- translation motion. We have fabricated the device, and confirmed its motion experimentally.

Keywords

indium compounds; micro-optomechanical devices; micromirrors; optical arrays; phase modulation; silicon-on-insulator; spatial light modulators; ITO; SOI wafer; Si-SiO₂; bidirectional single-axis rotation; bidirectional tilt-piston micromirror array; glass plate; indium tin oxide electrodes; optical MEMS; up- and down- translation motion; Electrodes; Indium tin oxide; Micromirrors; Optical arrays; Optical control; Optical filters; Optical pulse shaping; Phase modulation; Phased arrays; Ultrafast optics; ITO electrode; Optical MEMS; SOI; spatial light phase modulator;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300434

Filename

4300434