Title :
A Thermo-Pneumatically Actuated Tip-Tilt-Piston Mirror
Author :
Werber, Armin ; Zappe, Hans
Author_Institution :
Univ. of Freiburg, Freiburg
Abstract :
We present a novel, high stroke tip-tilt-piston micro-mirror actuated by thermo-pneumatic forces. A circular silicon mirror plate is mounted on top of three balloons, made of a 50 mum thick elastomer membrane. The balloons are inflated under thermo-pneumatic pressure, thus driving the mirror plate into tip-tilt and piston motion. Very large stroke values of 385 mum as well as tip-tilt angles of 5deg were measured. The triangular arrangement of the balloon actuator yields a high flexibility in mirror motion, including tip-tilt in any direction.
Keywords :
elastomers; pneumatic actuators; balloon actuator; elastomer membrane; piston motion; thermopneumatic forces; thermopneumatically actuated tip-tilt-piston mirror; triangular arrangement; Actuators; Biomembranes; Fabrication; Mirrors; Pistons; Platinum; Silicon; Solid state circuits; Substrates; Transducers; Actuator; Micro-optics; Polydimethylsiloxane; Thermo-pneumatics;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300435
