Proposition of Atomic Force Probes Based on Silicon Ring-Resonators

We present the first implementation of an atomic force microscope (AFM) probe using bulk- mode silicon resonators. This probe is developed in order to perform force or dissipation spectroscopy and to enable AFM imaging in liquids thanks to reduced dissipation effects. We show that balanced tip integration allows the probe to operate in a lateral mode derived from elliptical bulk modes of circular plates. A proof-of-concept technological realization opens up the way to first AFM experiments using this resonator around 7 MHz frequencies.