DocumentCode :
3377849
Title :
Highly Sensitive Cantilevers, with and without Magnetic Tip, for Magnetic Resonance Force Microscopy
Author :
Mouaziz, S. ; Dysli, A. ; Brugger, J. ; Boero, G.
Author_Institution :
Ecole Polytech. Federate de Lausanne, Lausanne
fYear :
2007
fDate :
10-14 June 2007
Firstpage :
1537
Lastpage :
1540
Abstract :
In this paper we present the fabrication and characterization of highly sensitive cantilevers, with and without magnetic tip, used for magnetic resonance force microscopy experiments. The full wafer silicon batch microfabrication was successful and the achieved production yield was about 70%. Cantilevers have been characterized in vacuum, at room temperature, and revealed promising properties for MRFM applications. A cantilever of 500times10times0.34 mum3 dimensions, a resonance frequency of 1670 Hz and a spring constant of 0.00014 N/m, we measured a quality factor of 27000 giving a minimum detectable force of 8times10-17 N/Hz1/2.
Keywords :
cantilevers; magnetic force microscopy; magnetic resonance; micromechanical devices; silicon; Si; highly sensitive cantilevers; magnetic resonance force microscopy; magnetic tip; production yield; wafer silicon batch microfabrication; Fabrication; Force measurement; Frequency measurement; Magnetic force microscopy; Magnetic resonance; Production; Resonant frequency; Silicon; Springs; Temperature sensors; MRFM; Si cantilevers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
Type :
conf
DOI :
10.1109/SENSOR.2007.4300438
Filename :
4300438
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3377849
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