Highly Sensitive Cantilevers, with and without Magnetic Tip, for Magnetic Resonance Force Microscopy

Author

Mouaziz, S. ; Dysli, A. ; Brugger, J. ; Boero, G.

Author_Institution

Ecole Polytech. Federate de Lausanne, Lausanne

fYear

2007

fDate

10-14 June 2007

Firstpage

1537

Lastpage

1540

Abstract

In this paper we present the fabrication and characterization of highly sensitive cantilevers, with and without magnetic tip, used for magnetic resonance force microscopy experiments. The full wafer silicon batch microfabrication was successful and the achieved production yield was about 70%. Cantilevers have been characterized in vacuum, at room temperature, and revealed promising properties for MRFM applications. A cantilever of 500times10times0.34 mum³ dimensions, a resonance frequency of 1670 Hz and a spring constant of 0.00014 N/m, we measured a quality factor of 27000 giving a minimum detectable force of 8times10^-17 N/Hz^1/2.

Keywords

cantilevers; magnetic force microscopy; magnetic resonance; micromechanical devices; silicon; Si; highly sensitive cantilevers; magnetic resonance force microscopy; magnetic tip; production yield; wafer silicon batch microfabrication; Fabrication; Force measurement; Frequency measurement; Magnetic force microscopy; Magnetic resonance; Production; Resonant frequency; Silicon; Springs; Temperature sensors; MRFM; Si cantilevers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300438

Filename

4300438