Title :
Evaluation of Piezoresistive Effects for Carbon Nanowire using MEMS Actuators
Author :
Kiuchi, Mario ; Isono, Yoshitada ; Matsui, Shinji ; Nakamatsu, Kenichiro
Author_Institution :
Ritsumeikan Univ., Kusatsu
Abstract :
This research develops Electrostatic Actuated NAno Tensile testing devices (EANATs) to evaluate mechanical and electrical properties of carbon nanowires fabricated by focus ion beam assisted chemical vapor deposition (FIB-CVD). This research measured I-V characteristics of carbon nanowires, with diameters ranging from 88 nm to 129 nm, under tensile loading in order to evaluate the gauge factor of nanowires. The averaged gauge factor of 0.7 is lower than that of hydrogenated amorphous C films. Discussion of the mechanical and electrical properties of the nanowires is made from scanning electron microscope-energy dispersive X-ray spectrometer (SEM-EDX) and scanning transmission electron microscope (STEM) observations.
Keywords :
X-ray chemical analysis; microactuators; nanowires; piezoresistive devices; scanning electron microscopes; tensile testing; IV characteristics; MEMS actuators; carbon nanowire; electrical properties; electrostatic actuated nano tensile testing devices; energy dispersive X ray spectrometer; focus ion beam assisted chemical vapor deposition; gauge factor; hydrogenated amorphous carbon films; mechanical properties; piezoresistive effects; scanning electron microscope; scanning transmission electron microscope; size 88 nm to 129 nm; tensile loading; Actuators; Electrostatics; Ion beams; Mechanical factors; Micromechanical devices; Nanoscale devices; Piezoresistance; Scanning electron microscopy; Testing; Transmission electron microscopy; Carbon Nanowire; FIB-CVD; I-V Characteristics; Tensile Test;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300443
