Title :
Nanoscale Straining of Individual Carbon Nanotubes by Micromachined Transducers
Author :
Jungen, A. ; Durrer, L. ; Stampfer, C. ; Hierold, C.
Author_Institution :
ETH Zurich, Zurich
Abstract :
We report on the (opto-)mechanical properties of integrated single-walled carbon nanotubes. Individual nanotubes were integrated into micro-actuators by a simple location-controlled integration process. These structures allowed for reproducible strain-dependent Raman analysis of individual nanotubes under various levels of tensile strain. The nanotubes were suspended in air, reducing the support interaction and enabling characterization based on transmission beams.
Keywords :
carbon nanotubes; microactuators; micromachining; nanotechnology; location-controlled integration process; microactuator; micromachined transducer; nanoscale straining; single-walled carbon nanotube; strain-dependent Raman analysis; Actuators; Capacitive sensors; Carbon nanotubes; Microactuators; Phonons; Raman scattering; Solid state circuits; Spectroscopy; Transducers; Uniaxial strain; NEMS; carbon nanotubes; process integration;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300444
