Title :
Optofluidic Maskless Lithography System
Author :
Chung, Su E. ; Park, Wook ; Park, Hyunsung ; Yu, Kyoungsik ; Park, Namkyoo ; Kwon, Sunghoon
Author_Institution :
Seoul Nat. Univ., Seoul
Abstract :
We propose and demonstrate an optofluidic maskless lithography technique to fabricate various polymer microparticles and microwires in microfluidic channels. Combining maskless lithography and microfluidic systems, we demonstrate temporal and spatial control of polymeric micro structure generation in microfluidic channels.
Keywords :
lithography; microchannel flow; photolithography; polymers; microfluidic channels; microfluidic systems; microwires; optofluidic maskless lithography system; polymer microparticles; polymeric micro structure generation; spatial control; temporal control; Control systems; Lithography; Microfluidics; Micromechanical devices; Micromirrors; Microstructure; Optical modulation; Optical polymers; Shape control; Streaming media; Maskless lithography; Microfluidics; Optofluidics; Polymer bead;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300446
